منابع مشابه
Design of a Novel MEMS Gyroscope Array
This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combin...
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This paper represents a MEMS based gyroscope to measure orientation. Silicon-micro-machined gyro is fabricated on the basis of resonators and they use vibrating mechanical element to sense rotation. The vibratory measurement can be done by measuring the change in capacitance with respect to the voltage or force applied in particular axis. Here MEMS based gyroscope has been designed from Lame mo...
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In this paper, an integrated MEMS gyroscope array method composed of two levels of optimal filtering was designed to improve the accuracy of gyroscopes. In the firstlevel filtering, several identical gyroscopes were combined through Kalman filtering into a single effective device, whose performance could surpass that of any individual sensor. The key of the performance improving lies in the opt...
متن کاملDesign and Analysis of a MEMS Comb Vibratory Gyroscope
MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and mechanical components in the scale of microns. Due to its small size, low cost, low power consumption and high efficiency, MEMS technology has been widely used in many fields. In this paper, a novel comb-driven, differential capacitance sensing MEMS vibratory gyroscope based on glass-silicon-glass...
متن کاملDesign and development of a MEMS-IDT gyroscope
The design, development and performance evaluation of a novel radio frequency microelectromechanical systems (MEMS) gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor is presented in this paper. Most of the MEMS gyroscopes based on silicon vibratory structures that utilize the energy transfer between the two vibratory modes demand small fabrication t...
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ژورنال
عنوان ژورنال: Sensors
سال: 2013
ISSN: 1424-8220
DOI: 10.3390/s130201651